Abstract
This work presents a self-powered liquid flow and bubble detection sensor based on the effect of contact-electrification between liquid and solid interface. Charge is driven by the electrostatic induction to flow across outer load without power supply. Single-step fluorocarbon plasma treated PDMS with wrinkle pattern is employed to contact with liquid, which could enhance the electric performance and protect electrode. Interdigital electrode is utilized to detect the liquid flow direction and velocity, while the grounded branch makes it capable to detect bubble. This new-designed active sensor with the advantages of simple structure, stability, multifunction and scalability has a promising application in microfluidic sensor system.
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