Triaxial tactile sensor utilizing standing laser-induced graphene cantilevers on polyimide film

Abstract

Microelectromechanical systems (MEMS) multiaxial tactile sensors have been developed in various fields to leverage their small size, high accuracy, and high sensitivity. Although various measurement principles have been proposed, most tactile sensors are fabricated using conventional and complicated Si processes. Conversely, laser-induced graphene (LIG) has recently attracted significant attention as a material for fabricating physical sensors due to its high sensitivity as a piezoresistor through simple laser processing. Therefore, the application of LIG to MEMS processes is expected to yield unprecedented MEMS sensor devices. In this paper, we propose a triaxial tactile sensor using standing LIG cantilevers embedded in an elastic body. The proposed sensing element was fabricated using ultraviolet (UV) laser irradiation to shape a polyimide film into cantilever structures and CO2 laser irradiation to form LIG strain gauges. Subsequently, the flat LIG cantilevers were stood up using thermal deformation. These multiple three-dimensional LIG cantilever elements enable multiaxial force measurements. The cantilever and elastic body portion of the sensor had dimensions of 3 × 3 × 0.2 mm and 12.5 × 12.5 × 3 mm, respectively. The fabricated sensor response was evaluated, and its capability to independently measure triaxial forces was verified. Therefore, the proposed simple and reproducible fabrication process is useful for realizing compact multiaxial tactile sensors.