Abstract

In the previous research, the ultra-smoothness grinding method based on the new concept is developed and applied to the horizontal surface grinder. From the results, the surface roughness is found to attain below 50nm (Rz) in grinding of a cemented carbide, a glass, ceramics and so on. The removal rate obtained using the horizontal surface grinder, however, is small though the rate is larger than lapping and polishing. First of all, in the research, in order to make the rate much larger, the rate in ultra-smoothness grinding method is analyzed. On the basis of the analysis, the vertical surface grinder is designed and manufactured on trial. Furthermore the grinding characteristics using the vertical surface grinder is examined. Comparing with the removal rate obtained using the horizontal surface grinder in the previous research, the removal rate attains 10 times in the same smoothness.

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