Abstract

AbstractPlasma assisted deposition of hard coatings is a well‐known technique to improve the properties of bulk materials. From a detailed knowledge of the wear mechanisms and the characteristic properties of the coated materials there can be deduced the requirements to the deposition technique. These requirements are discussed in relation to the plasma parameters and the plasma ‐ surface interaction for the plasma assisted physical vapour deposition and the plasma assisted chemical vapour deposition.

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