Traveling wave ultrasonic motor using polymer-based vibrator

Abstract

With the characteristics of low density, low elastic modulus, and low mechanical loss, poly(phenylene sulfide) (PPS) is a promising material for fabricating lightweight ultrasonic motors (USMs). For the first time, we used PPS to fabricate an annular elastomer with teeth and glued a piece of piezoelectric-ceramic annular disk to the bottom of the elastomer to form a vibrator. To explore for a material suitable for the rotor surface coming in contact with the PPS-based vibrator, several disk-shaped rotors made of different materials were fabricated to form traveling wave USMs. The polymer-based USM rotates successfully as the conventional metal-based USMs. The experimental results show that the USM with the aluminum rotor has the largest torque, which indicates that aluminum is the most suitable for the rotor surface among the tested materials.