Trapped-Energy Thickness-Extensional Mode of a Partially Electroded ZnO Thin-Film Resonator.

Abstract

Free and forced vibration analysis of ZnO thin-film resonator operating with trapped-energy thickness-extensional (TE) mode is performed based on the dispersion curves for both the unbounded fully electroded and unelectroded films. The thickness solutions to the free vibration problem consist of the mode branches of the dispersion curves for the electroded and the unelectroded regions, respectively. The mode branches in the unelectroded region that carry energy away from the vibration zone are neglected because this effective energy loss corresponds to a complex frequency in the frequency spectrum. Since the thickness solutions in each region have satisfied the differential equations and the boundary conditions on the major surfaces exactly, the substitution of the thickness solutions into the modified Hamilton variational principle derived by Tiersten gives an approximate continuity condition in the form of integral over the thickness of the resonator at the interface between the electroded and unelectroded regions. The stationary condition of the integral continuity condition leads to a system of homogeneous linear equations, which determines the frequency spectrum ranging from the first TE cutoff frequency of the fully electroded film to that of the unelectroded film where the conventional trapped-energy vibration occurs. Forced vibration analysis of ZnO thin film driven into TE mode by applying a voltage to the top and bottom electrodes is also performed, which further verifies the validity of the obtained results from the free vibration analysis.