Abstract

Frequency-dependent conductance measurement has been carried out for polycrystalline chemically vapour-deposited diamond films. It is found that the electrical conduction in annealed diamond films consists of frequency-independent band conduction dominating in a low frequency range, hopping conduction with f 0.8 behaviour in a high frequency range and frequency-dependent conduction relating to thermal emission of carriers from trap levels. The frequency-dependent conductance can allow us to estimate the activation energy of trap levels. Three trap levels with activation energies of 0.62, 1.38 and 0.95 eV are found in undoped films. It is observed that the 0.62 and 1.38 eV trap levels are inactive in hydrogenated diamond films. In boron-doped films, on the contrary, the activation energy of the boron acceptor level is 0.39 ± 0.05 eV over a wide range of low boron concentrations from 1 × 10 17 to 3 × 10 18 cm −3.

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