Abstract
Electron impact ionization rates for an impurity-related electron trapping center in amorphous SiO2 films have been determined. These rates were obtained from analyses of trap population kinetics during uv-stimulated photocurrent injection. The dependence of the impact ionization rate αN on accelerating electric field E has been parameterized: αN = 25 exp(−1.5/E) cm−1, for E in MV/cm. This expression is the statistical average of results from three MOS specimens with a mean volume-averaged trapping state density N ≈5×1013 cm−3.
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