Abstract
Trap levels in diamond-like carbon (DLC) films obtained by plasma-activated chemical vapour deposition in methane are investigated by using the thermally stimulated current (TSC) technique. Peaks are found on the TSC curve. The peaks arise from the thermal liberation of trapped carriers in the DLC films. A few methods to analyse the peak shape are applied to obtain the energy of the trap levels. It is shown that the energy of the trap levels decreases with increasing negative self-bias voltage V c of the R.F.-powered electrode.
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