Abstract
This paper uses plasma-enhanced chemical vapor deposition (PECVD) to successfully fabricate silicon oxide films on silicon dioxide substrates for supporting layers of uncooled infrared focal plane array microbridge structures. In this paper, the thickness, refractive index, growth rate, and other parameters of the films were measured using the XP-2 step meter and ellipsometer. At the same time, atomic force microscopy (AFM) was used to study the surface morphology of the films. The experimental results show that deposition temperature and ICP power are the main factors affecting the growth rate of thin films. Deposition temperature is a crucial factor affecting the surface morphology of thin films.
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