Abstract
The AlO x thin films were deposited on the polycarbonate by reactive ion beam sputtering (RIBS) at different oxygen partial pressures where the AlO x thin film with O/Al ratio of 1.5 was formed when oxygen partial pressure increased from 4 × 10 −5 to 2 × 10 −4 Torr. As a result, oxygen transmission rate (OTR) of the barrier significantly decreased from 24 cm 3/m 2 day to around 2 cm 3/m 2 day with increase in oxygen partial pressure. Optical transmittances of the films were in the 86–88% range at 550 nm versus 89% for the pure polycarbonate film.
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