Transparent Multi-layer Conductive Electrode Film Prepared by DC Sputter Deposition and its Flat Panel Display Application

Abstract

Multi-layer conductive electrode films to be used as substrate for a plastic liquid crystal display (LCD) were prepared by the DC magnetron roll-to-roll sputtering method. The conductive layer is consisted of three layers, ITO/Ag/ITO, ITO/APC/ITO and SnO 2 /Ag/ITO, on the polymer substrate. The multi-layered conductive electrode has sheet resistance of about 5-8 Ω/square, optical transparency of 85-88 % at 550 nm, and appropriate gas permeability. In particular, the ITO/APC/ITO structured electrode shows about 5-10 % higher transmittance at 600-800 nm ranges than structures of SnO 2 /Ag/ITO and ITO/Ag/ITO.