Abstract
The use of metal oxide transparent conductive electrodes in a charge-injection device (CID) imaging array has resulted in a quantum efficiency of approximately 70 percent, uniform throughout the visible, with useful array response out to 3500 A. The advantages of using highly transparent metal oxide electrodes for the fabrication of frontside illuminated arrays is described. A new high density CID cell is described, which does not require any contact windows or diffused regions. This cell structure is simply composed of two crossed rows and column electrodes and is easily fabricated. Because no contacts are required, it can be reduced in size for large high density arrays. The results for a 32 × 32 self-scanned array are presented.
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