Abstract
Transparent conducting antimony-doped tin oxide (SnO2:Sb) films were deposited on organic substrates by r.f. magnetron-sputtering. Polycrystalline films with a resistivity of ≈ 6.5×10-3 Ω cm, a carrier concentration of≈ 1.2×1020 cm-3 and a Hall mobility of ≈ 9.7 cm2 v-1 s-1 were obtained. The average transmittance of these films reached 85% in the wavelength range of the visible spectrum.
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