Abstract
Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3 dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm2 at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10−8 A/cm2 at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.
Highlights
In recent years, there has been considerable interest in transparent electronic devices formed on plastic or other bendable substrates to meet the growing demand for low-cost, large-scale, high-flexibility, and lightweight devices [1]
We demonstrated a kind of transparent capacitor with nanolaminate Al2O3/ TiO2/Al2O3 (ATA) as dielectrics and Al-doped ZnO (AZO) as electrodes on quartz glass [15]
An average optical transmittance of more than 70% was observed, which is valuable for applications in transparent electronics
Summary
There has been considerable interest in transparent electronic devices formed on plastic or other bendable substrates to meet the growing demand for low-cost, large-scale, high-flexibility, and lightweight devices [1]. Examples of transparent and flexible applications include flat-panel displays, e-papers, solar cells, and wearable computers [2,3]. In driven circuits of these transparent devices, capacitors play an important role such as storage capacitors in solar cell modules [4]. High-k oxides are promising candidates for materials used in transparent electronics due to their excellent properties such as large dielectric constants, high optical transmittance, and simple preparation methods [7]. TiO2 is an attractive material due to its transparency and a large dielectric constant of
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
