Transmission line interconnect on Si CMOS LSI

Abstract

We have developed on-chip transmission line interconnect for Gbps signal transmission on cm-order long metal interconnect. Design and electrical performance of differential transmission lines, and Tx/Rx circuit for on-chip applications are presented. Furthermore, it is exhibited from the view point of FoM (figure of merit), that the transmission line interconnect is superior to another interconnects such as the conventional RC, CNT (carbon nanotube), and optical interconnects for global interconnect