Abstract
High-contrast transmission channeling images and linescans of isolated bunches and individual 60° misfit dislocations in thick partially relaxed Si1−xGex∕Si layers are presented. Changes in dislocation contrast with tilt angle are explained using a model of planar dechanneling by the two-edge components of 60° dislocations. By careful analysis of the tilting contrast, all of the four possible combinations of the two-edge components of the Burger’s vector of 60° dislocations may be distinguished.
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