Abstract
Extended electron energy loss fine structure (EXELFS) spectra obtained with a transmission electron microscope (TEM) are well suited to studies of core edges in the soft x-ray region[ 11. Transmission EXELFS data offer structural measurements localized within microscopic (< 100 nm diameter) regions of interest. Growth in this area of analysis has been slow because of low inelastic scattering cross-sections for 100 kV to 300 kV accelerating voltage electrons and limitations in the statistical quality of spectra attainable with serial acquisition systems. Parallel detection EXELFS experiments are expected to show statistical quality and radiation damage effects similar to those obtained in EXAFS spectra for samples which cannot be examined by transmission x-ray absorption[2]. In the present study, we demonstrate the excellent quality of the parallel detection EXELFS signal by examining the variation of the EXELFS amplitude with temperature for a thin aluminum foil.
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