Abstract
The optics and construction of a transmission electron microscope are reviewed, along with electron diffraction and its relation to image contrast. Three general areas of thin film analysis by transmission electron microscopy are discussed: geometric determinations, involving variations in the thickness of thin films, substrate dislocations and grain size; microstructure determination by electron diffraction, using ionized cluster beam deposited aluminum; analysis of an interfacial reaction by a combination of diffraction and X-ray fluorescence, using Inconel 718 and a lithia-silica glass ceramic. Future trends in the use of transmission electron microscopy for the analysis of thin films are discussed.
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