Abstract
We have synthesized 5 wt. %-yttria-stabilized zirconia (YSZ) films on stainless steel and glass substrates by pulsed laser deposition (PLD) at substrate temperatures between 60 and 600 °C and oxygen pressures from 0.1 to 1000 mTorr. While highly (101)-oriented tetragonal YSZ films are obtained at intermediate oxygen pressures, near complete (001)-oriented tetragonal films are achieved at lower oxygen pressures, with a full width at half maximum X-ray peak of only 0.4°. The results can be attributed to surface energy-induced orientation; that is, the lowest surface energy plane of the YSZ films changes from (101) plane at intermediate pressures to the (001) plane at lower oxygen pressures due to surface relaxation.
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