Abstract
We present the performance of transition edge sensors (TES) using Au/Ti bilayer (operating temperature 113 mK ) with fast decay time for industrial applications. The energy resolution was 9.2 eV for Mn K α1 (designed value 3.5 eV ) and the decay time 71 μs , yielding the count rate 2.3 kcps (count per sec). We found that the energy resolution was limited by excess noise. The excess noise increased in proportion to the inverse of TES resistance as decreasing the TES resistance from normal resistance. The source of excess noise might exist in the TES.
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