Abstract
An electrical plasma diagnostic method is proposed to determine plasma density and electron temperature. When two square voltages with different amplitudes are applied to a probe tip, a capacitor connected to the probe is charged due to the current flowing from the plasma. To obtain the plasma parameters, a circuit model with a nonlinear sheath and capacitor is proposed. The electron temperature and plasma density given by the model can be obtained from the ratio of the capacitor voltages. The results are in agreement with those obtained from electron energy probability functions in argon inductively coupled plasma discharge.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
