Transient response characterization of ohmic contact RF MEMS switches

Abstract

The experimental characterization of the transient response within ohmic contact series RF MEMS switches is demonstrated in this paper. Standard devices are inserted into a time domain test setup, and the transient response is measured using an oscilloscope. The experimental results show that high-order mechanical vibration modes occur during the switching cycle. The response of the switch is analyzed by mechanical theory. This transient response characterization will lend deep insight into factors affecting the switch lifetime.