Abstract
We investigate the mechanism of laser-induced plasma-assisted ablation (LIPAA), by which high-quality and high-efficiency ablation of transparent materials, such as glass, can be performed with a single conventional pulsed laser. The laser-induced plasma induces transient absorption of the laser beam (532nm) by the glass substrate. The origin of the transient absorption is electron excitation by ions with kinetic energy more than approximately 10eV in the plasma, which is observed by measuring transient polarization change in the glass substrate applied with a high external pulsed electric field during the plasma-assisted electron excitation (plasma-conductivity measurement). A possible mechanism of LIPAA is proposed based on the results obtained.
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