Abstract
In modern high resolution optical systems like astronomical telescopes or lithographic objectives, performance degradations can be caused by various disturbances. Holistic optical system simulation is required to predict the performance or the high precision systems. In this paper a method for transient dynamical-thermal-optical system modeling and simulation is introduced. Thereby, elastic deformation, rigid body motion, and mechanical stresses due to dynamical excitation are calculated using elastic multibody system simulation and temperature changes are determined using thermal finite element analysis. The deformation, the motion, and the mechanically and thermally induced stress index changes are then considered in a gradient-index ray tracing. Finally, the presented method is applied in a dynamical-thermal single lens system.
Highlights
Nowadays, the developed high precision optical instruments are very sensitive to external influences
The pink image results if the disturbances due to lens motions and deformations and the thermal refraction index changes nθ due to the heating of the lens are considered in the ray tracing
Finite element thermal analysis, model order reduction methods, elastic multibody system simulation, and optical ray tracing with gradients in the refraction index are combined
Summary
The developed high precision optical instruments are very sensitive to external influences. Holistic system simulation is used to predict the system performance accurately and to prove that the design meets the demanded requirements. In lithographic objectives even small mechanical disturbances like deformations or rigid body motions of the mirrors or lenses resulting from external excitation, e.g., from the waver motion system lead to performance degradations. Temperature changes in the optical elements due to the heating from the laser beams influence the imaging performance. In laser-based additive manufacturing the laser beam has alternating on and off times and the laser beam moves during the exposure time. Transient simulations are necessary to simulate the optical system behavior. A holistic optical system simulation must be able to consider transient mechanical and thermal disturbances. In this paper a method for transient
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