Abstract
Transformation of the films with the pores of different radii under the action of vacuum ultraviolet radiation was studied experimentally and theoretically. Simulation results showed that Si–O–Si angle depends on pore size. Fourier Transform infrared spectra provide indirect confirmation of this statement. The experimental data and calculation results suggest that methyl group decreases π bonding, which causes a decrease in Si–O–Si angle. The action of ultraviolet radiation is to be considered as a photochemical reaction; the fragments formed in this reaction (СН3⁎, CH2⁎) can participate in polymerization, which leads to pore sealing.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
