Abstract
A trajectory planning method and precision control strategies for scan-move of step-scan projection lithography are investigated. The difference of trajectory planning between step-move and scan-move is firstly discussed. Aiming at the requirements of accuracy and strict synchronization of scan-move,several key issues are analyzed. Considering the accuracy losses in discrete-time implementation of trajectory planning algorithm,the integration strategy in discrete-time domain of precision control of trajectory planning is presented with combination of internal integer integration strategy. Furthermore,a compensation method with a correcting factor of constant velocity scan phase is advanced. Experiment results demonstrate that the proposed trajectory planning algorithm and its precision compensation strategy are accurate and effective. These methods are successfully applied in ultra-precision motion control system of 100 nm step-scan projection lithography equipment.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
