Abstract
A novel 9-axis micro-machine is presented. The machine has three linear motor driven major axes and a magnetically levitated rotary table with six degrees of freedom. The table can rotate freely with pitch, roll, and yaw and three linear short stroke motions. The major drives bring the tool to the vicinity of target location while the magnetically levitated table positions the machine accurately. All nine drives are controlled simultaneously by considering the redundant kinematics of the machine without saturating the stroke limits. Simulation and experiments show the generated reference commands do not violate the limits of the feed drives, and is sufficiently accurate.
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