Abstract
The intrinsic hysteresis behavior of piezoelectric materi al limits the tracking control accuracy of the actuators. Th is paper describes a tracking control method for piezoelectric actuators based on the combination of feedforward and feedback loops. The hysteresis of piezoelectric actuators is linear ized in feedforward loop with an inverse hysteresis model based on a neural network. The number of parameters in the neural network based inverse model is relatively small and the parameters are easy to identify. The feedback loop is used to reduce the accumulated error produced by the inverse hysteresis model. The experimental results show that the accuracy is significantl y improved in tracking control by using the combination of feedback and feedforward control.
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