Abstract
Presented is a closed-loop feedback control of an electrostatically actuated micromirror to track a moving light source and to stabilise fast the tilting angle. The micromirror has been designed and fabricated with single crystalline silicon. Tracking and tilt-angle stabilisation has been tested using a position-sensing detector and analogue feedback control circuit. Successful tracking of a moving light source was achieved. The feedback control has been also verified to improve the tilt-angle stabilisation time of the micromirror significantly.
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