Track-Etch Membranes as Tools for Template Synthesis of Highly Sensitive Pressure Sensors.

Abstract

Flexible pressure sensors with high sensitivity are highly desired in wearable electronics and human-machine interaction. Introducing the surface microstructures to the capacitive-type sensors can improve sensitivity and reduce response time. However, conventional techniques for the fabrication of highly sensitive and large-area pressure sensors still remain challenging. Here, a template synthesis approach is reported for fabrication of a large-area and low-cost ionic micropillar array templated from track-etch membranes. The pressure sensors based on the ionic micropillars gel dielectric layers exhibit a low limit of detection (∼0.5 Pa) and high sensitivity (14.83 kPa-1) in the low-pressure regime (0-5 kPa) and linear sensitivity (1.96 kPa-1) over a wide pressure range of 24-230 kPa. The versatility of the sensors is demonstrated in various human physiological signal detection scenarios and spatial pressure distribution. Furthermore, a real-time pressure mapping insole was fabricated on the basis of a large-area micropillared ionic gel dielectric layer combined with the screen-printing technique. The scalable and low-cost fabrication of pressure sensors with micropillars templated from a track-etch membrane provides new insights into the future development of health monitoring and human-machine interaction.