Abstract
Trace-moisture standards traceable to the International System of Units (SI) used for the performance test of trace-moisture analyzers and trace-moisture measurement systems based on cavity ring-down spectroscopy (CRDS) developed at the National Metrology Institute of Japan (NMIJ) are briefly reviewed. The magnetic-suspension-balance/diffusion-tube humidity generator, which was the first generator used for the trace-moisture standard developed at NMIJ, is presented. Three measurement systems based on CRDS, which are wavelength-meter-controlled CRDS, dual-laser CRDS, and miniaturized CRDS, are presented. The performance of the three CRDS systems were evaluated using the SI-traceable trace-moisture standards.
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