Abstract

Gas analysis has become an important task in various fields of science and industry, especially through techniques based on laser spectroscopy. Common applications are, for example, the monitoring of the atmosphere to assess human impact on ecosystems and the climate, the monitoring of airborne molecular contamination to supervise sensitive high-tech processes like semiconductor manufacturing, or the analysis of combustion processes. High resolution laser spectroscopy lends itself particularly well for gas analysis, as it is fast, selective, and the results can be made traceable to the SI units. Traceability is of particular importance to maximize the reliability of measurement results, especially if such measurements are the input for complicated models like those used in climate research or if impacting political decisions. In this contribution we give an overview on our approach to achieve traceability of results from spectroscopic amount fraction measurements of H2 O, CO2 , and NH3 including the TILSAM method (traceable infrared laser-spectrometric amount fraction measurement). We discuss how this method applies to tunable diode-laser absorption spectroscopy (TDLAS), cavity ring-down spectroscopy (CRDS), and photoacoustic spectroscopy (PAS). This research is partly embedded in projects within the European Metrology Research Programme (EMRP).

Highlights

  • The measurement of gas concentrations in terms of the amount fraction is a wide field of gas metrology and can be necessary or beneficial in many fields of science and technology [1]

  • Amount fraction measurements based on laser spectroscopy are versatile and advantageous in a wide field of applications

  • Emerging commercial instruments are easy to use and do not require specialized knowledge of spectroscopy which makes them attractive tools in gas analysis, but with missing traceability when operated as absolute instruments

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Summary

Introduction

The measurement of gas concentrations in terms of the amount fraction is a wide field of gas metrology and can be necessary or beneficial in many fields of science and technology [1]. Traceability is a key issue for the above mentioned applications This is understood by the potential harm which could follow from erroneous measurements when political decisions (e.g. concerning CO2 or NH3 emissions), terms of trade (e.g. based on natural gas quality) or yields in semiconductor fabrication (clean room air quality) depend on such measurements. In this contribution we discuss our approach to achieve traceability in laser-based amount of substance fraction measurements and describe the basic measurement principles and how uncertainty and traceability are addressed

Background
Traceability in laser-based measurements
CRDS and PAS
Conclusions
Full Text
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