Abstract
We have developed a laser absorption spectroscopy with a near-infrared distributed-feedback (DFB) laser diode as an in-situ and real time monitoring system in relation to future ultra-large scale integration (ULSI) technology. There we have found the existence of the H/sub 2/O-HCl cluster formed by hydrogen association in HCl gas. We have also demonstrated that the moisture in HCl gas can be precisely estimated by measurement of a vibrational spectrum of the isolated H/sub 2/O molecule itself while dissociating the cluster by probing laser energy.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
