Abstract
Cleanroom dry wipers were tested for trace metals by ultrapure water extraction, acid extraction, and high temperature ashing followed by Inductively Coupled Plasma – Mass Spectrometry analysis. All wipers showed high level titanium at 0.15 - 0.18 wt. %. Trace metals extracted by ultrapure water were limited even with sonication and results from dilute nitric acid extraction were hundreds of times higher, possibly due to improved solubility of metal/metal oxide/salt. Metal results from high temperature ashing process were the highest as ashing released all metals, attached to and embedded in the wiper, for acid digestion. The effects of acid composition, acid concentration, extraction time, and extraction temperature on metal extraction were also investigated. Results indicated one hour extraction at 80oC extracted more metal than twenty-four hour extraction at room temperature and hydrofluoric acid - hydrogen peroxide mixture was more effective than nitric acid in most cases.
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