Abstract

Nanoindentation has emerged as a pioneering technique for fabricating array structures at the nanoscale. This research incorporates molecular dynamics simulations to investigate the deformation mechanisms of materials influenced by structured indenters exhibiting diverse geometries. The primary objective of this study is to mitigate interference during the continuous indentation applied by the indenters, diminish the material's elastic recovery, and minimize the occurrence of defects. The simulation results unveil that plastic deformation of the workpiece induced by structured indenters manifests through the nucleation and slip of dislocations. The cylindrical indenter engenders the most pronounced residual indentation morphology, accompanied by substantial pile-up interference and an extensive range of dislocation expansion, surpassing that of other indenters. Conversely, pyramidal indenters exhibit minimal residual indentation morphology, albeit displaying considerable elastic recovery. A comprehensive evaluation that considers factors such as recovery after indentation, ease of processing, system stability, and material transfer against the indentation force is imperative for the determination of the ideally structured indenter. The meticulous analysis supports the efficacy of paraboloidal indenters possessing smaller taper angles in attaining consistent processing results, rendering them highly suitable for continuous indentation processing. The research content bears significant implications for advancing the application of structured indenters.

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