Towards the use of the conformal-evaporated-film-by-rotation technique in fabricating microelectronic circuits and microsystems

Abstract

We used the conformal-evaporated-film-by-rotation technique to deposit a conformal coating of chalcogenide glass on the external surface of a microsystem—specifically, the outermost surface of a microelectromechanical system comb resonator. We concluded that this technique could complement the multi-step, time-consuming and expensive traditional lithographic processes, resulting in a reduction of the number of steps needed for the fabrication of microsystems and nanosystems.