Abstract
Abstract The characterization of thin film parameters derives from the measurement difference between the coated and bare substrate. This method of comparison is based on the stationarity of the substrate: the characteristics of the substrate do not depend on the presence of the film. However, the thermoelastic loss of a coated substrate depends on the thermo-mechanical parameters of the film as well, which are generally unknown. When thermoelastic loss is dominant, the coating loss measurements are completely altered. In this paper, we propose a model that helps to understand the role of each material property in the thermoelasticity of layered plates, and with this we identified three possible cases in which any coating-substrate combination could be classified. In particular, we analyzed the IBS silica film deposited on silicon. Using the model, we were able to explain the experimental results and also selected a thinner substrate for future coating loss measurements. With this choice, cryogenic loss measurements on bare substrate confirm that thermoelastic loss becomes irrelevant for temperatures below 130 K-180 K, depending on the mode.
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