Abstract
Scandium complexes with β-diketonate ligands are valuable precursors for the metal–organic chemical vapour deposition (MOCVD) of scandia based materials. The technology has been constantly developing and demanding novel precursors with accurately defined thermal properties, which could be used in MOCVD as well as related gas phase processes. Two new complexes with 1,1-difluoroacetylacetone (dfac) and 5,5,6,6,6-pentafluorohexane-2,4-dione (5Fac) have been synthesized, isolated, and characterized. The volatility and condensed phase behaviour including thermal stability and phase transitions of the obtained compounds have been studied; the saturated vapour pressures over crystalline Sc(dfac)3 and liquid Sc(5Fac)3 complexes have been measured. As a result, the standard molar thermodynamic characteristics of melting, sublimation, and vaporization processes have been calculated. Thermal properties of these compounds have been compared with literature data on scandium(III) β-diketonates already used as MOCVD precursor. These new compounds can be successfully used as precursors in the gas-phase deposition processes, and the set of obtained thermodynamic data can help in choosing the optimal deposition conditions.
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