Towards the Analogy of Electrostatic and Electromagnetic Transducers

Abstract

Electromechanical, or mechatronic, transducers exchange energy between the mechanical and electrical domain via electrostatic and electromagnetic transduction principles, which are the basis for actuators and sensors. This paper reveals the simple analogy between electrostatic and electromagnetic transducers. Summarizing the well-known Gauß, Ampère’s, Ohm’s, Chua’s, Newton’s, Hook’s and the damping laws into a signal-flow diagram with linearized coefficients, the model shows the transducers reciprocity and physical behavior of damped spring-mass mechatronic systems. The presented modeling approach simplifies the derivation of transfer functions, the pull-in phenomenon, and the coupling factors for the design of feedback methods for mechatronic systems. The analogies are shown by comparing an electrostatic and an electromagnetic parallel-plate actuator, represented by a torsional MEMS scanning mirror and a hybrid reluctance fast steering mirror, respectively. The paper discusses the actuators performance and compares the transducer coefficients and the intrinsic stiffness regarding pull-in.