Abstract
The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale with high repeatability is still a major barrier to the commercialization of graphene. In this review article, we discuss the merits of integrating graphene into Micro-Nano Electromechanical Systems, current approaches for the mass production of graphene integrated devices, and propose solutions to overcome current manufacturing limits for the scalable and repeatable production of integrated graphene-based devices.
Highlights
Micro-Nano ElectromechanicalFor over a decade graphene has been studied as a 2D material with numerous favorable properties including high strength and elastic modulus [1], high electron mobility [2], and high thermal conductivity [3]
For applications in integrated Microelectromechanical systems (MEMS)/NEMS and electronic devices it is important to understand the coefficient of thermal expansion (CTE) of graphene
Low temperature growth of graphene is important to preserve the integrity of thin-film and devices that will be integrated with graphene such as MEMS/NEMS; it is not trivial to find appropriate ways to achieve low temperature growth
Summary
For over a decade graphene has been studied as a 2D material with numerous favorable properties including high strength and elastic modulus [1], high electron mobility [2], and high thermal conductivity [3]. For manufacturing graphene at a large scale, it is important to understand how the parameters affecting production speed and the quality of graphene are related. Suspending graphene is challenging because the transfer and release process often introduces defects into the devices which researchers need to address in addition to intrinsic defects already present in the graphene. We will highlight the current challenges for graphene to be successfully implemented in MEMS/NEMS device applications at a large scale and suggest how these difficulties can be overcome. The most conclusive evidence of the stability and existence of graphene was presented by Novoselov et al [10] They were able to successfully isolate graphene from a bulk graphite crystal using a mechanical exfoliation technique. Andre Geim and Konstantin Novoselov were awarded the Nobel Prize in 2010 for the discovery of graphene and its groundbreaking properties
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