Abstract
130,000 g/mol molecular weight of polyvinylpyrrolidone (PVP) was purposed to prepare PZT sol desiring the thick film (≥1.0 µm) deposition on Pt(111)/TiO2/SiO2/Si. Centrifugal force and the spilling of sol during spin coating were found to control the cracks and surface coverage of the films. A rotation-dependent typical pattern formation at the central part of the substrate was observed and better coverage was observed on gel drying 60 °C than 125 °C. Though the remnant polarization (2Pr) of 21.4 µC/cm2 was recorded at 100 Hz for 2.1 µm, it is 41.8 µC/cm2 for 1.06 µm thick films.
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