Abstract
AbstractAn overview on particle‐based simulation of nanocomposite formation in a magnetron plasma is given. After discussing recent kinetic Monte Carlo results for metal cluster growth and diffusion, new results for the simulation of co‐sputtering of metal and polymer are presented. Then, the second method based on molecular dynamics is discussed and time‐resolved results for the coalescence of two clusters in the plasma are shown. We conclude with an outlook on the prospects for an integrated simulation of cluster growth in the plasma coupled to the surface deposition phase (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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