Abstract

The fabrication and transfer of freestanding single-crystal ferroelectric membranes deserve intensive investigations as to their potential applications in flexible wearable devices, such as flexible data storage devices and varied sensors in E-skin configurations. In this report, we have shown a comprehensive study approach to the acquisition of a large-area freestanding single-crystal ferroelectric BaTiO3 by the Sr3Al2O6 scarification layer method. By controlling the thickness of the BaTiO3 and Sr3Al2O6, the exposed area of the Sr3Al2O6 interlayer, and the utilization of an additional electrode La2/3Sr1/3MnO3 layer, the crack density on the freestanding BaTiO3 can be dramatically decreased from 24.53% to almost none; then, a more than 700 × 530 μm2 area high-quality freestanding BaTiO3 membrane can be achieved. Our results offer a clear and repeatable technology routine for the acquisition of a flexible large-area ferroelectric membrane, which should be instructive to other transition metal oxides as well. Our study can confidently boost flexible device fabrication based on single-crystal transition metal oxides.

Highlights

  • Flexible single-crystal oxide membranes have attracted tremendous investigations, both experimentally and theoretically, due to their potential applications in wearable devices as well as for aiding our fundamental understanding of flexible electronics [1,2,3]

  • PFM Phase Analysis and Freestanding Membrane Transfer Process In Figure 1a, we have shown the piezoelectric force microscopy (PFM) image of the BTO on

  • We systematically summarized the influence of the thickness of the Sr3 Al2 O6 (SAO) sacrificial layer and the BTO membrane on the crack density

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Summary

Introduction

Flexible single-crystal oxide membranes have attracted tremendous investigations, both experimentally and theoretically, due to their potential applications in wearable devices as well as for aiding our fundamental understanding of flexible electronics [1,2,3]. Different from the conventional metal [4,5] and organic materials [6,7], which offer a convenient fabrication of flexible membranes, the achievement of flexible transition metal oxides seems a tough task owing to that they always exhibit the nature of rigidity with poor fracture toughness, transition metal oxides provide the unique physics properties, such as ferroelectricity [8], colossal magnetoresistance [9], and superconductivity [10], etc., benefiting to the multiple functionalities of future flexible wearable devices. It is well known that the pronounced ferroelectricity needs a long-range lattice ordering [18]; the fabrication of a large-area BTO single-crystal flexible membrane without cracks and a non-damage transfer process are definitely crucial.

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