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Abstract
We discuss steps toward the readout of the position of a nanoelectromagnetic system (NEMS) beam resonator using a Nb nanosuperconducting quantum interference device (nanoSQUID). We describe our fabrication procedure for coupling the nanoSQUID and a suspended Al-coated Si3N4 NEMS resonator together by a combination of focused ion beam lithography and nanomanipulation. We discuss typical electrical characteristics of the integrated devices, and independent postfabrication atomic force microscope nanoindentation measurements of the elastic properties of the integrated resonator to estimate its natural frequencies of vibration. We compare and discuss the response of a nanoSQUID with current-carrying and superconducting screening (noncurrent carrying) modes of operation of the resonator
Highlights
S QUIDS (Superconducting Quantum Interference Devices) are ultrasensitive detectors of magnetic flux and through suitable input transduction may be used to measure a wide range of physical parameters including electrical currents, photon energies, or displacements of mechanical sensors [1]
The growing interest in nanoelectromechanical systems (NEMS) devices is due to the vast array of potential applications
We have chosen to develop nanoscale SQUIDs as readouts due to their high intrinsic flux sensitivity [10] resulting from their low geometric inductance, L, and because we would like to match the scale of the SQUID to the resonator
Summary
S QUIDS (Superconducting Quantum Interference Devices) are ultrasensitive detectors of magnetic flux and through suitable input transduction may be used to measure a wide range of physical parameters including electrical currents, photon energies, or displacements of mechanical sensors [1]. We have chosen to develop nanoscale SQUIDs (nanoSQUIDs) as readouts due to their high intrinsic flux sensitivity [10] resulting from their low geometric inductance, L, and because we would like to match the scale of the SQUID to the resonator. The latter consideration allows us to firstly optimize the sensing area of the SQUID loop so we can measure the displacement directly with no input transduction, and secondly to permit easier fabrication processes which for instance may be partially done in-situ. The use of Si3 N4 with its higher Young’s modulus, and the low mass of the beam configuration allows potentially higher resonant frequencies, which should lead to greater sensitivity in mass or chemical detection applications
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