Toward the integration of a single carbon nanofibre as via interconnect

J.C Coiffic,H Le Poche,D Mariolle,N Chevalier,S Olivier,M Fayolle,S Maitrejean

doi:10.1016/j.mee.2008.04.050

Toward the integration of a single carbon nanofibre as via interconnect

J.C Coiffic, H Le Poche + Show 5 more

https://doi.org/10.1016/j.mee.2008.04.050

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Journal: Microelectronic Engineering	Publication Date: May 24, 2008
Citations: 6

Affiliation: Atomic Energy and Alternative Energies Commission, CEA LETI, Université Grenoble Alpes, Grenoble Institute of Technology, CEA Grenoble, CEA LITEN

#Number Of Carbon Nanotubes #Carbon Nanofibre + Show 4 more

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Abstract

The use of carbon nanotube/nanofibres as via interconnects is widely studied. As the vias dimensions decrease below 50 nm, the number of carbon nanotubes could be close to the unity in each via hole. In the present study we show the integration processes to obtain interconnects made of one single vertically free standing carbon nanofibre. Two different catalyst integrations are detailed and tested.

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