Abstract

In the last decade, a new technique has been developed for the nanoimprinting of thin-metal foils using laser-induced shock waves. Recent studies have proposed replacing metal or silicone molds with inexpensive polymer molds for nanoimprinting. In addition, explosive-derived shock waves provide deeper imprinting than molds, greatly simplifying the application of this technology for mass production. In this study, we focused on explosive-derived shock waves, which persist longer than laser-induced shock waves. A numerical analysis and a set of simplified molding experiments were conducted to identify the cause of the deep imprint. Our numerical analysis has accurately simulated the pressure history and deformation behavior of the workpiece and the mold. Whereas a high pressure immediately deforms the polymer mold, a sustained pressure gradually increases the molding depth of the workpiece. Therefore, the duration of the pressure can be one of the conditions to control the impact imprint phenomenon.

Highlights

  • Complete punching was not observed, for the case of H = 20 mm, i.e., for the experiment with the highest pressure applied to the foil. This effect was later clearly simulated using numerical analysis, and it is discussed in the subsection

  • The rapidly increasing pressure indicated the arrival of theofunderwater shock wavewave and and formation of the peak; the sure indicated the arrival the underwater shock formation of first the first peak; PC

  • We conducted molding experiments of Al workpieces with relatively large sizes and pressure-measuring experiments using explosive-derived underwater shock large sizes and pressure-measuring experiments using explosive-derived underwater waves and compared the experimental results with the numerical simulation results. This shock waves and compared the experimental results with the numerical simulation restudy revealed that the duration of pressure is one of the conditions to control the shocksults

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Summary

Introduction

The nanostructures on the surfaces of metals exhibit unique electrical behavior depending upon their size and shape. The constituent material of the mold was a metal deposited on a polycarbonate (PC) substrate They showed that an Al foil imprinted with the trench-shaped DVD mold generated photovoltaic power, owing to surface plasmon resonance [8]. In submicron-order processing, the surface roughness of the starting material affects the final imprinting shape of the sample [14], and the local deformation and fracture of the workpiece are highly dependent on its grain size [15]. These are the factors that complicate the shock-imprinting phenomenon in submicron-order processing.

Experimental Section
Numerical
Numerical-simulation
Experimental Results
Numerical Simulation Results pressure profile profileshown shownininFigure
Conclusions
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