Abstract
We present micromechanical experiments of DC magnetron sputtered high-entropy nitride thin films, single-phase (Al,Ta,Ti,V,Zr)N with nearly equimolar metal-fractions, and of their Si-alloyed variant. The (Al,Ta,Ti,V,Zr)N coating exhibits a hardness of ∼30 GPa and a fracture toughness of 2.4 MPa√m. Alloying this high-entropy nitride with ∼5 at% Si does not influence the hardness and fracture toughness but lowers significantly the elastic response. Consequently, the elastic strain to failure increases by more than 30% leading to a significantly improved damage tolerance for the Si alloyed (Al,Ta,Ti,V,Zr)N.
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