Abstract
To combat the brittleness of hard nc-CrAlN/a-SiNx nanocomposite (nc-: nanocrystalline, a-: X-ray amorphous), different Ni content (from 0 to 39.8at.%) is doped via magnetron sputtering. Glancing Angle X-ray Diffractometry, X-ray photoelectron spectroscopy, Field Emission Scanning Electron Microscopy and Transmission Electron Microscopy are employed to investigate the microstructural evolution. With increased Ni, the grain size decreases accompanied with morphology change, from dense glassy to coarse columns. With 4.2at.% Ni, scratch toughness of nc-CrAlN/a-SiNx hard nanocomposite (28GPa) is improved by around 200% at expense of only 18% hardness.
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