Abstract
Touch mode capacitive pressure sensors offer better performance in industrial applications than other devices. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure in operation range. The advantages of this mode of operation are near-linear output characteristics, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment. The principle, design, and characteristics of touch mode capacitive pressure sensors using various materials and technologies are discussed in this paper.
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